Optimization of the electrostatic structure of the ion microprobe

Abstract

The paper presents optimization data obtained for an immersion probe-forming system of the ion microprobe to be used in 3 MeV H+ ion accelerator generating 0,4 μm beam spot for normalized acceptance of 7 μm2 · mrad2 · MeV. To achieve higher microprobe resolution it is intended to place an electrostatic lens between the collimators and the accelerating tube.

Keywords

• ion beam; immersion probe-forming system; optimizations; electrostatic accelerator