Effect of Electrode Thickness on Quality Factor of Ring Electrode QCM Sensor

Abstract

As a key type of sensor, the quartz crystal microbalance (QCM) has been widely used in many research areas. Recently, the ring electrode QCM sensor (R-QCM) with more uniform mass sensitivity has been reported. However, the quality factor (Q-factor) of the R-QCM has still not been studied, especially regarding the effect of electrode thickness on the Q-factor. Considering that the Q-factor is one of crucial parameter to the QCM and it is closely related to the output frequency stability of the QCM, we study the effect of different electrode thicknesses on the Q-factor of the R-QCM in this paper. On the other hand, we clarify the relationship between the electrode thickness and the Q-factor of the R-QCM. The measurement results show that the average Q-factor increases with increases in the thickness of ring electrodes generally; however, the resonance frequency of the QCM resonator decreases with increases in the thickness. The low half-bandwidth (2Γ 6000), which indicates that it has a higher frequency stability and can be applied in many research areas.

Keywords

• QCM
• ring electrode
• quality factor
• electrode thickness