Fano-Resonance Photonic Crystal Membrane Reflectors at Mid- and Far-Infrared

Yichen Shuai; Deyin Zhao; Gautam Medhi; Robert Peale; Zhenqiang Ma; Walter Buchwald; Richard Soref; Weidong Zhou

doi:10.1109/JPHOT.2013.2240446

IEEE Photonics Journal (Jan 2013)

Fano-Resonance Photonic Crystal Membrane Reflectors at Mid- and Far-Infrared

Yichen Shuai,
Deyin Zhao,
Gautam Medhi,
Robert Peale,
Zhenqiang Ma,
Walter Buchwald,
Richard Soref,
Weidong Zhou

Affiliations

Yichen Shuai: <formula formulatype="inline"><tex Notation="TeX">$^{1}$</tex></formula>Department of Electrical Engineering, NanoFAB Center, University of Texas at Arlington, TX, USA
Deyin Zhao: Department of Electrical Engineering, NanoFAB Center, University of Texas at Arlington, TX, USA
Gautam Medhi: <formula formulatype="inline"><tex Notation="TeX">$^{2}$</tex></formula>Physics Department, University of Central Florida, Orlando, FL, USA
Robert Peale: Physics Department, University of Central Florida, Orlando, FL, USA
Zhenqiang Ma: <formula formulatype="inline"><tex Notation="TeX">$^{3}$</tex></formula>Department of Electrical and Computer Engineering, University of WI-Madison, WI, USA
Walter Buchwald: <formula formulatype="inline"><tex Notation="TeX">$^{4}$</tex></formula>Department of Physics and Engineering Program, University of Massachusetts, Boston, MA, USA
Richard Soref: Department of Physics and Engineering Program, University of Massachusetts, Boston, MA, USA
Weidong Zhou: Department of Electrical Engineering, NanoFAB Center, University of Texas at Arlington, U.S.

DOI: https://doi.org/10.1109/JPHOT.2013.2240446
Journal volume & issue: Vol. 5, no. 1
pp. 4700206 – 4700206

Abstract

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We report here single-layer ultracompact Fano-resonance photonic crystal membrane reflectors (MRs) at mid-infrared (IR) and far-IR (FIR) bands, based on single layer crystalline Si membranes. High-performance reflectors were designed for surface-normal incidence illumination with center operation wavelengths up to the 75-μm FIR spectral band. Large-area patterned MRs were also fabricated and transferred onto glass substrates based on membrane transfer processes. Close to 100% reflection was obtained at the ~ 76-μm spectral band, with a single-layer Si membrane thickness of 18 μm. Such Fano-resonance-based membranes reflectors offer great opportunities for high-performance ultracompact dielectric reflectors at IR and THz regions.

Published in IEEE Photonics Journal

ISSN: 1943-0655 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4563994

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