Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film

Abstract

Abstract Owing to excellent performance and a simple mechanism, stretchable piezoresistive strain sensors have been applied to human skin for monitoring physical activities, physiological activities, etc. However, it is still a challenge to simultaneously realize highly sensitive and stretchable piezoresistive strain sensors with high optical transparency. This study reports a transparent and stretchable piezoresistive strain sensor with 2D surface buckling by fabricating ultrathin indium tin oxide (ITO) film on the biaxially pre‐stretched polyacrylate (VHB) elastomer followed by pre‐stretch releasing. To the authors' knowledge, semiconductors are applied for a stretchable piezoresistive strain sensor for the first time. Furthermore, this strain sensor exhibits a high sensitivity of 569, a high transparency of 88% and a high biaxial stretchability of 110% at the same time. This device demonstrates the good long‐term stability over 500 stretching–relaxing cycles. The high sensitivity can be mainly attributed to the piezoresistive effect of the semiconductor where carrier mobility and the resulting resistivity can be significantly changed by the strain. The strain sensors attached to human skin are used to monitor many human motions such as chewing, swallowing, breathing, and walking. ITO‐based strain sensors pave the way toward the development of highly stretchable and sensitive wearable electronics.

Keywords

• buckling
• electronic skins
• piezoresistive sensors
• strain sensors
• stretchable electronics
• wearable electronics