The modeling design integral the electrostatic microelectromechanical switch of capacitive type

Abstract

This article presents the optimization and static modeling of the design an integral microelectromechanical switch of capacitive type based on a parametric 3D model using finite element analysis software complex ANSYS. The values of the pull-down voltage and switching time are determined. The obtained results give a good theoretical help in the development of various high-performance electrostatic microelectromechanical switches.