Infrared Absorption Efficiency Enhancement of the CMOS Compatible Thermopile by the Special Subwavelength Hole Arrays

Yun-Ying Yeh; Chih-Hsiung Shen; Chi-Feng Chen

doi:10.3390/app10082966

Applied Sciences (Apr 2020)

Infrared Absorption Efficiency Enhancement of the CMOS Compatible Thermopile by the Special Subwavelength Hole Arrays

Yun-Ying Yeh,
Chih-Hsiung Shen,
Chi-Feng Chen

Affiliations

Yun-Ying Yeh: Department of Mechanical Engineering, National Central University, Taoyuan City 32001, Taiwan
Chih-Hsiung Shen: Department of Mechatronics Engineering, National Changhua University of Education, Changhua 50007, Taiwan
Chi-Feng Chen: Department of Mechanical Engineering, National Central University, Taoyuan City 32001, Taiwan

DOI: https://doi.org/10.3390/app10082966
Journal volume & issue: Vol. 10, no. 8
p. 2966

Abstract

Read online

The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxide-semiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.

Published in Applied Sciences

ISSN: 2076-3417 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Engineering (General). Civil engineering (General); Science: Biology (General); Science: Physics; Science: Chemistry
Website: http://www.mdpi.com/journal/applsci

About the journal

Abstract

Keywords