Proceedings
(Aug 2017)
The First Frequency-Modulated (FM) Pitch Gyroscope
- Valentina Zega,
- Paolo Minotti,
- Giorgio Mussi,
- Alessandro Tocchio,
- Luca Falorni,
- Stefano Facchinetti,
- Andrea Bonfanti,
- Andrea L. Lacaita,
- Claudia Comi,
- Giacomo Langfelder,
- Alberto Corigliano
Affiliations
- Valentina Zega
- Department of Civil and Environmental Engineering, Politecnico di Milano, Milan 20133, Italy
- Paolo Minotti
- Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan 20133, Italy
- Giorgio Mussi
- Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan 20133, Italy
- Alessandro Tocchio
- STMicroelectronics, AMG, Cornaredo 20010, Italy
- Luca Falorni
- STMicroelectronics, AMG, Cornaredo 20010, Italy
- Stefano Facchinetti
- STMicroelectronics, AMG, Cornaredo 20010, Italy
- Andrea Bonfanti
- Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan 20133, Italy
- Andrea L. Lacaita
- Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan 20133, Italy
- Claudia Comi
- Department of Civil and Environmental Engineering, Politecnico di Milano, Milan 20133, Italy
- Giacomo Langfelder
- Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan 20133, Italy
- Alberto Corigliano
- Department of Civil and Environmental Engineering, Politecnico di Milano, Milan 20133, Italy
- DOI
-
https://doi.org/10.3390/proceedings1040393
- Journal volume & issue
-
Vol. 1,
no. 4
p.
393
Abstract
Read online
In this work, the mechanical design and the experimental validation of a micro-electromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroelectronics and it represents, to the authors’ knowledge, the first small-footprint (690 µm × 946 µm) prototype of FM gyroscope able to measure an in-plane angular rate. The measured scale factor, defined as the mean angular gain, equals 0.973 Hz/Hz, in close agreement with theoretical predictions. It depends only on the mass distribution in the mechanical structure and is, consequently, not influenced by environmental fluctuations.
Keywords
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