A Quintuple-Bimorph Tenfold-Chamber Piezoelectric Pump Used in Water-Cooling System of Electronic Chip

Abstract

To meet the dual requirement of high flow rate and high output pressure in water-cooling system of electronic chip, a quintuple-bimorph tenfold-chamber piezoelectric pump (QTPP) is presented, which owns the comprehensive advantages of parallel and serial connection. QTPP is composed of two groups of five-chamber-in-series, and the two groups of five-chamber-in-series can be in parallel or serial. QTPP is designed and fabricated, the output performance of which is invested by experiments. The experimental results show that QTPP can obtain high flow rate and high output pressure under low driving voltage. When driven by quintuple piezoelectric vibrators under 60Vpp, QTPP in parallel can obtain the maximum flow rate of 251.1ml/min and the maximum output pressure of 60.2kPa. While in serial, QTPP can obtain 186.2ml/min and 109.9kPa respectively. The water-cooling system with QTPP is established and experimented. The experimental results indicate that the water-cooling system with QTPP can achieve a good cooling performance under low driving voltage. Under the driving voltage of 60Vpp, QTPP can reduce the temperature of stimulate chip from 107.8°C to 51°C.

Keywords

• Piezoelectric pump
• multiple-chamber
• serial
• parallel
• water-cooling