Design and Experiment of Dual-Mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method

Huiliang Cao; Yu Liu; Yingjie Zhang; Xingling Shao; Jinyang Gao; Kun Huang; Yunbo Shi; Jun Tang; Chong Shen; Jun Liu

doi:10.1109/ACCESS.2019.2909973

IEEE Access (Jan 2019)

Design and Experiment of Dual-Mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method

Huiliang Cao,
Yu Liu,
Yingjie Zhang,
Xingling Shao,
Jinyang Gao,
Kun Huang,
Yunbo Shi,
Jun Tang,
Chong Shen,
Jun Liu

Affiliations

Huiliang Cao: ORCiD; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Yu Liu: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Yingjie Zhang: ORCiD; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Xingling Shao: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Jinyang Gao: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Kun Huang: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Yunbo Shi: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Jun Tang: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Chong Shen: ORCiD; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China
Jun Liu: Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, China

DOI: https://doi.org/10.1109/ACCESS.2019.2909973
Journal volume & issue: Vol. 7
pp. 49111 – 49124

Abstract

Read online

This paper presents a sense mode closed-loop method for dual-mass micro-electro-mechanical system (MEMS) gyroscope based on the bipole temperature compensation method. A pair of conjugate poles are investigated as the bottle neck of the sense closed-loop system of MEMS gyroscope, and the bipole temperature compensation proportional controller (BTCPC) is employed to realize the closed-loop: a pair of additional conjugate zeros are utilized to generate bipoles with poles. Since poles changes with temperature, thermal resistance is utilized in BTCPC to make zeros variable with temperatures. The BTCPC is designed very carefully to make the system have enough bandwidth and better performance. The overall gyroscope model is established and simulated either in the time domain or the frequency domain, and the results verify that the sense closed-loop works rapidly and steadily. The system is realized on PCBs and is tested on the turntable in temperature oven. The experimental results show that the bias stability, angular random walking, bias temperature coefficient, and the bandwidth values of sense open-loop and closed-loop are 2.168 °/h, 0.155 °/%/h, 9.534 °/h/°C, 13 Hz, and 2.168 °/h, 0.140 °/%/h (five tests average value), 5.991 °/h°C, 61 Hz, respectively.

Published in IEEE Access

ISSN: 2169-3536 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering
Website: https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=6287639

About the journal

Abstract

Keywords