Radiation behaviour of mm‐wave on‐wafer probes in H‐band and the influence on antenna measurements

Abstract

Abstract This letter presents a comprehensive analysis of the radiation behaviour exhibited by nine distinct on‐wafer radio‐freqeuncy (RF) probes used for device characterization in the mm‐wave bands of integrated circuits and antennas. The tested probes are sourced from two different manufacturers and feature various probe pitches. All probes are intended for use with the WR‐3.4 waveguide band ranging from 220 to 330 GHz. To the best of the authors' knowledge, such a detailed examination of RF probes operating in this band with respect to their radiation behaviour has not been demonstrated before.

Keywords

• antenna testing
• measurement uncertainty
• millimetre wave antennas
• millimetre wave measurement