APL Materials (Feb 2015)

Selective growth of single phase VO2(A, B, and M) polymorph thin films

  • Amar Srivastava,
  • Helene Rotella,
  • Surajit Saha,
  • Banabir Pal,
  • Gopinadhan Kalon,
  • Sinu Mathew,
  • Mallikarjuna Motapothula,
  • Michal Dykas,
  • Ping Yang,
  • Eiji Okunishi,
  • D. D. Sarma,
  • T. Venkatesan

DOI
https://doi.org/10.1063/1.4906880
Journal volume & issue
Vol. 3, no. 2
pp. 026101 – 026101-7

Abstract

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We demonstrate the growth of high quality single phase films of VO2(A, B, and M) on SrTiO3 substrate by controlling the vanadium arrival rate (laser frequency) and oxidation of the V atoms. A phase diagram has been developed (oxygen pressure versus laser frequency) for various phases of VO2 and their electronic properties are investigated. VO2(A) phase is insulating VO2(B) phase is semi-metallic, and VO2(M) phase exhibits a metal-insulator transition, corroborated by photo-electron spectroscopic studies. The ability to control the growth of various polymorphs opens up the possibility for novel (hetero)structures promising new device functionalities.