Electrica (Jan 2024)

Frequency Response Analysis of MEMS Comb-Drive Resonator Integrated With a Polymer Thin Film Layer

Serdar Tez,
Mehmet Kaya

Affiliations

Serdar Tez
Mehmet Kaya

DOI: https://doi.org/10.5152/electrica.2024.23124
Journal volume & issue: Vol. 24, no. 1
pp. 210 – 217

Abstract

No abstracts available.

Published in Electrica

ISSN: 2619-9831 (Online)
Publisher: AVES
Country of publisher: Türkiye
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering
Website: https://electricajournal.org/EN

About the journal