Special Issue “ALD Technique for Functional Coatings of Nanostructured Materials”
Javier Garcia Fernández,
Victor Vega Martínez,
Victor Manuel de la Prida Pidal
Affiliations
Javier Garcia Fernández
Departamento de Física, Facultad de Ciencias, Universidad de Oviedo, C/Federico García Lorca nº 18, 33007 Oviedo, Spain
Victor Vega Martínez
Laboratorio de Membranas Nanoporosas, Edificio de Servicios Científico Técnicos “Severo Ochoa”, Universidad de Oviedo, C/Fernando Bonguera s/n, 33006 Oviedo, Spain
Victor Manuel de la Prida Pidal
Departamento de Física, Facultad de Ciencias, Universidad de Oviedo, C/Federico García Lorca nº 18, 33007 Oviedo, Spain
Atomic layer deposition (ALD) is a vapor-phase technique that consists of the alternation of separated self-limiting surface reactions, which enable film thickness to be accurately controlled at the angstrom level, based on the former atomic layer epitaxy method [...]
