Light: Science & Applications (Mar 2022)

Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping

  • Jiaming Wang,
  • Mingxing Wang,
  • Fujun Xu,
  • Baiyin Liu,
  • Jing Lang,
  • Na Zhang,
  • Xiangning Kang,
  • Zhixin Qin,
  • Xuelin Yang,
  • Xinqiang Wang,
  • Weikun Ge,
  • Bo Shen

DOI
https://doi.org/10.1038/s41377-022-00753-4
Journal volume & issue
Vol. 11, no. 1
pp. 1 – 8

Abstract

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A desorption-tailoring strategy is demonstrated to steadily prepare self-assembled p-AlGaN superlattices with sub-nanometer ultrathin barriers by MOCVD, which juggle the hole concentration and transport.