Frontiers in Physics (May 2022)

Micro-Movement Measured by Laser Heterodyne Interferometer Based on Acousto-Optic Effect

  • Bailin Lin,
  • Wei Dai,
  • Jun Sun,
  • Mengting Xiao,
  • Zihan He,
  • Jianjian Wu,
  • Xinqi Chen,
  • Xinqi Chen

DOI
https://doi.org/10.3389/fphy.2022.890194
Journal volume & issue
Vol. 10

Abstract

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In this experiment, the stable output of a dual-frequency laser source is obtained by an acousto-optic modulator due to the Bragg diffraction effect. Furthermore, the non-polarized dual-laser heterodyne interferometer is designed to measure the micro-movement of stacked piezoelectric (PZT) ceramic. This micro-movement can be dynamically determined by comparing the phase difference between the conference beam and measuring beam. The results indicate that the micro-movement of PZT ceramic changes linearly with the driven-voltage in the range of 0–30 V and the sensitivity of movement to voltage is 58.3 nm/V, which is very close to the theoretical value and this laser heterodyne interferometer can be applied for calibrating parameters of PZT ceramic.

Keywords