Engineering and Technology Journal (Mar 2013)

Characteristics of Nanostructure Porous Silicon Prepared by Anodization Technique

  • Ayoub H. Jaafar,
  • Uday M. Nayef

DOI
https://doi.org/10.30684/etj.31.3B.7
Journal volume & issue
Vol. 31, no. 3B
pp. 339 – 347

Abstract

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Porous silicon (PS) layers are prepared by anodization for different current densities. The samples are then characterized the nanocrystalline porous silicon layer by X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), Fourier Transform Infrared (FTIR), Reflectivity and Raman. PS layers were formed on a p-type Si wafer. anodized electrically with a 10 and 40 mA/cm2 current density for fixed 20 min etching times. We have estimated crystallites size from X-Ray diffraction about nanoscale for porous silicon and AFM confirms the nanometric size and therefore optical properties about nanocrystalline silicon yields a Raman spectrum showing a broadened peak shifted below 520 cm-1.

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