Tekhnologiya i Konstruirovanie v Elektronnoi Apparature (Oct 2009)
Forming of 4НSiC p–i–n-diodes mesastructures by the ion-plasmous etching method
Abstract
The results of research and optimization of 4НSiC p–i–n-diodes mesastructures manufacturing method are presented as well as analysis of current-voltage characteristics and switching characteristics of p–i–n-diodes in the 25—500°C temperature range.