MEMS Capacitive Thermal Sensor Sensitivity Investigation Using Full Factorial Design Method

Abstract

In this paper a sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 25 factorial design the effect of factors in this sensor was calculated and main factors that affect on sensor’s sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.

Keywords

• MEMS
• Bimetallic cantilever
• Full factorial design
• Sensitivity
• Thermal Sensor