VLSI for microelectronic coordinate-sensitive detector of the devices for element analysis of substance

Abstract

VLSI which provides the simultaneous analysis of all composition of substance with a high sensitivity and precision has been developed. VLSI contains 384 detectors with a spatial resolution 25 microns. Application of the microcircuit allows essential lowering of the weight, size and power consumption of the detector, reducing the period of analysis and the expenditure of the material which is investigated.

Keywords

• VLSI
• microelectronic coordinate-sensitive detector
• element analysis