Rapid Evaluation of Electron Mobilities at Semiconductor–Insulator Interfaces in an Ambient Atmosphere by a Contactless Microwave-Based Technique

• Junichi Inoue,
• Yusuke Tsutsui,
• Wookjin Choi,
• Kai Kubota,
• Tsuneaki Sakurai,
• Shu Seki

Affiliations

Junichi Inoue

Department of Molecular Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan

Yusuke Tsutsui

Department of Molecular Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan

Wookjin Choi

Department of Molecular Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan

Kai Kubota

Department of Molecular Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan

Tsuneaki Sakurai

Department of Molecular Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan

Shu Seki

Department of Molecular Engineering, Graduate School of Engineering, Kyoto University, Kyoto, Japan