The surface of ceramic products manufactured using diamond grinding is replete with shallow scratches, deep grooves and other defects. The thickness of the defective layer amounts to 3–4 µm and it must be removed to increase wear resistance of the products when exposed to intense thermomechanical loads. In this study, removal of the defective layers from samples made of ZrO2, Al2O3 and Si3N4 with a beam of fast argon atoms was carried out with a stripping rate of up to 5 µm/h. To prevent contamination of the source of fast argon atoms by the sputtered dielectric material, the beam was compressed and passed to the sample through a small hole in a wide screen. Due to the removal of the defective layer, abrasive wear decreased by an order of magnitude and the adhesion of coatings deposited on the cleaned ceramic surfaces improved significantly.
