Cailiao Baohu (Mar 2022)
Microstructure and Mechanical Properties of (TiAlSi)N Medium Entropy Coatings
Abstract
In order to improve the protective effect of the surface coating of mechanical parts, combining with the unique design concept of medium entropy alloy,(TiAlSi)N coatings were deposited on surface of 316 L stainless steel by plasma enhanced magnetron sputtering(PEMS). The chemical composition, crystal structure, micro-morphology and surface roughness of coatings were analyzed using X-ray energy dispersive spectrometer(EDS), X-ray diffractometer(XRD), field emission scanning electron microscope(FE-SEM) and atomic force microscope(AFM). The bonding strength, hardness and elastic modulus of the coatings were tested with nano scratch/indentation instrument. EDS analysis results showed that(TiAlSi)N coating was a medium entropy ceramic coating.(TiAlSi)N coatings possessed an amorphous structure, a smooth and compact surface, and good mechanical properties. The bonding strength, hardness and elastic modulus were 25 N, 21 GPa and 225 GPa, respectively. These experimental results would provide a valuable data reference for further future research on this kind of coating systems.
Keywords