The influence of F, F2 on kinetics of electrons in BF3

Abstract

We present transport coefficients for electrons in mixtures of BF3 with its radicals (specifically F and F2) for ratios of the electric field to the gas number density E/N from 1 to 1000 Td (1 Td = 10-21 V m2). Our analysis of non-conservative collisions revealed a range of E/N where electron attachment to radicals significantly changes the electron kinetics compared to pure gaseous BF3. The results were obtained using simple solutions for Boltzmann’s equation and Monte Carlo simulation.

Keywords

• BF3
• F
• F2
• elendif
• Monte Carlo code