Effect of Crystal Rotation on Melt Convection and Resistivity Distribution in 200 mm Floating Zone Silicon Single Crystal Growth

• Ding Yan,
• Yongtao Wang,
• Ruigang Shang,
• Guohu Zhang

Affiliations

Ding Yan

GRINM National Engineering Research Center of IC key materials, Beijing, China

Yongtao Wang

GRINM Semiconductor Materials Co., Ltd., Beijing, China

Ruigang Shang

GRINM Semiconductor Materials Co., Ltd., Beijing, China

Guohu Zhang

GRINM Semiconductor Materials Co., Ltd., Beijing, China