Acoustic impedance-based surface acoustic wave chip for gas leak detection and respiratory monitoring

Abstract

Abstract Acoustic impedance enables many interesting acoustic applications. However, acoustic impedance for gas sensing is rare and difficult. Here we introduce a micro-nano surface acoustic wave (SAW) chip based on the acoustic impedance effect to achieve ultra-fast and wide-range gas sensing. We theoretically established the relationship between surface load acoustic impedance and SAW attenuation, and analyzed the influence of acoustic impedance on acoustic propagation loss under different gas/humidity media. Experimental measurements reveal that the differences in acoustic impedance generated by different gases trigger different acoustic attenuation, and can achieve wide-range (0–100 v/v%) gas monitoring, with ultra-fast response and recovery speeds reaching sub-second levels (t 90 < 1 s, t 10 < 0.5 s) and detection limit of ~1 v/v%. This capability can also be perfectly utilized for human respiratory monitoring, accurately reflecting respiratory status, frequency, and intensity. Consequently, the SAW chip based on the acoustic impedance effect provides a new solution for in-situ detection of gas leaks and precise monitoring of human respiration.