EPJ Web of Conferences (Jan 2023)

Thermo-optic phase shifter based on amorphous silicon carbide

  • Mallemace Elisa D.,
  • Lu Yaoqin,
  • Shi Xiaodong,
  • Chaussende Didier,
  • Tabouret Vincent,
  • Rao Sandro,
  • Ou Haiyan,
  • Della Corte Francesco G.

DOI
https://doi.org/10.1051/epjconf/202328714010
Journal volume & issue
Vol. 287
p. 14010

Abstract

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We report the preliminary experimental results for an amorphous silicon carbide (a-SiC) thermo-optic phase shifter (TOPS). This device is based on microring resonator (MRR) structure with a titanium (Ti) heater placed on the top of the device, separated by 1.5 μm thick SiO2 to reduce the optical loss. The proposed a-SiC microring has a thickness and a radius of 1.1 μm and 33 μm, respectively. By applying an electrical power in the Ti heater, a resonance wavelength shift at an optical wavelength of λ=1550 nm is shown, and the extracted thermal tunability is 52.2 pm/mW.