Negative-tone molecular glass photoresist for high-resolution electron beam lithography

Abstract

A low molecular weight organic compound containing bis-phenol A backbone (BPA-6OH) is reported as a negative-tone photoresist. This material has a high glass transition temperature and excellent thermal stability. A good contrast, well-resolved line pattern around 73.4 nm and sensitivity of 52 µC cm−2 can be received for negative-tone molecular glass photoresist upon exposure in electron beam lithography system. It indicates that the negative-tone molecular glass photoresist is one of the promising candidates for use in electron beam lithography.

Keywords

• photoresist
• molecular glass photoresist
• electron beam lithography
• photolithography
• negative-tone photoresist