Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

Abstract

Given the multiple applications for micro-electro-mechanical system (MEMS) mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools) with experimental data and subsequently verifying with quasi-static and dynamic experiments.

Keywords

• MEMS mirrors
• vanadium dioxide
• phase-change materials
• hysteresis
• dynamic model