Three-Dimensional Shape Measurement Method for Micro Droplet Utilizing Micro LIF Technique

Abstract

This paper describes a novel measurement technique for three-dimensional shape of micro droplet utilizing micro LIF (Laser Induced Fluorescence) technique. A measurement system consisted of microscope equipped with 10x lens, high sensitive CCD camera, mercury lamp, optical filters and so on. Calibration curve between thickness of micro droplet and emission of fluorescence dye solution was obtained by the use of the PDMS (polydimethylsiloxane) microchip, whose depth varied from 10 to 95 μm fabricated using photo lithography technique. The microchip based calibration method provides high measurement accuracy and eliminate photobleaching effect. Measurement accuracy of the present method in depth direction was about 0.57 μm assessed using laser con-focal microscope and the spatial resolution in the horizontal plane became 6.7 μm. The technique is useful to investigate a gas-liquid two-phase flow in micro scale.

Keywords

• micro droplet
• three dimensional shape measurement
• gas liquid two phase flow
• micro lif
• microchip