VISUALIZATION OF MEMS STRUCTURES FOR EDUCATION OF AUTOMOBILE MICROSYSTEMS

Abstract

The work is aimed at visualization of working principles of microelectromechanical sensors which are used in automobile electronic systems. Attention is paid to accelerometric, inclinometric, pressure and MAF devices. These are used in systems for stability control, passive and active safety as well as comfort management. The visualizations were realized using modern animation techniques initiated by the creation of virtual materials, 2D and 3D objects, through scene exposure, pending their animation and final cutting.

Keywords

• MEMS
• accelerometer
• inclinometer
• pressure sensor
• HUD
• MAF
• LIGA
• micromachining