Light: Science & Applications (May 2022)

Graphene-driving novel strain relaxation towards AlN film and DUV photoelectronic devices

  • Hieu. P. T. Nguyen

DOI
https://doi.org/10.1038/s41377-022-00861-1
Journal volume & issue
Vol. 11, no. 1
pp. 1 – 2

Abstract

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Graphene-driving strain-pre-store engineering enables the epitaxy of strain-free AlN film with low dislocation density for high efficiency DUV-LEDs.