Sensors (Dec 2013)

InN Based Water Condensation Sensors on Glass and Flexible Plastic Substrates

  • Viorel Dumitru,
  • Stefan Costea,
  • Mihai Brezeanu,
  • George E. Stan,
  • Cristina Besleaga,
  • Aurelian C. Galca,
  • Gabriela Ionescu,
  • Octavian Ionescu

DOI
https://doi.org/10.3390/s131216940
Journal volume & issue
Vol. 13, no. 12
pp. 16940 – 16949

Abstract

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In this paper, we report the realization and characterization of a condensation sensor based on indium nitride (InN) layers deposited by magnetron sputtering on glass and flexible plastic substrates, having fast response and using potentially low cost fabrication technology. The InN devices work as open gate thin film sensitive transistors. Condensed water droplets, formed on the open gate region of the sensors, deplete the electron accumulation layer on the surface of InN film, thus decreasing the current of the sensor. The current increases back to its initial value when water droplets evaporate from the exposed InN film surface. The response time is as low as 2 s.

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