Ag nanoparticles sputtered on silicon wafer are used as masks for the fabrication of silicon columns by ion etching, which induces the growth of the inclined Ag nanorod by inclined Ag sputtering. V-shaped and Z-shaped Ag nanorods can be obtained by varying incline angles and deposition times. SERS detection and FDTD simulation are used to compare and investigate the enhanced electromagnetic coupling of incline nanorod arrays with different shapes in three-dimensional space, which indicates that Z-shaped nanorods show good SERS properties. The Z-shaped Ag nanorod array is used as a SERS substrate for the detection of thiabendazole with a concentration down to 10−11 M.
