Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection

Abstract

The advancement of semiconductor technology nodes requires precise control of their manufacturing process, including plasma etching, which is highly important in terms of the yield, cost, and device performance. Endpoint detection (EPD) is an imperative technique for controlling this process. Here, we propose a novel EPD scheme based on multivariate kernel density estimation (MKDE). The proposed approach is developed by extending the conventional unsupervised learning MKDE method to supervised learning. The performance of the proposed scheme is validated on randomly selected optical emission spectroscopy data collected from an industrial semiconductor manufacturing process. Because the proposed approach uses target values (labeling) of data, it demonstrates enhanced EPD performance compared to the conventional MKDE method, even without threshold presetting.

Keywords

• Multivariate kernel density estimation
• plasma etching
• endpoint detection
• anomaly detection
• supervised learning
• semiconductor manufacturing