Superhydrophobic surfaces attract a lot of attention due to many potential applications including anti-icing, anti-corrosion, self-cleaning or drag-reduction surfaces. Despite a list of attractive applications of superhydrophobic surfaces and demonstrated capability of lasers to produce them, the speed of laser micro and nanostructuring is still low with respect to many industry standards. Up-to-now, most promising multi-beam solutions can improve processing speed a hundred to a thousand times. However, productive and efficient utilization of a new generation of kW-class ultrashort pulsed lasers for precise nanostructuring requires a much higher number of beams. In this work, we introduce a unique combination of high-energy pulsed ultrashort laser system delivering up to 20 mJ at 1030 nm in 1.7 ps and novel Diffractive Laser-Induced Texturing element (DLITe) capable of producing 201 × 201 sub-beams of 5 µm in diameter on a square area of 1 mm2. Simultaneous nanostructuring with 40,401 sub-beams resulted in a matrix of microcraters covered by nanogratings and ripples with periodicity below 470 nm and 720 nm, respectively. The processed area demonstrated hydrophobic to superhydrophobic properties with a maximum contact angle of 153°.
