A Comparative Design Analysis of Internal and External Frame Structures for MEMS Vibrating Ring Gyroscopes

Abstract

This research presents a comparative analysis of the two important design methodologies involved in developing microelectromechanical system (MEMS) vibrating ring gyroscopes, namely, internal and external ring gyroscopes. Internal ring gyroscopes are constructed with the outside placement of support pillars connected with the semicircular beams that are attached to the vibrating ring structure. The design importance of this particular setting effectively isolates the vibrating ring structure from any external mechanical vibrations, significantly improving the gyroscope’s performance. The internal ring structure provides exceptional precession and reliability, making this design an ideal candidate for harsh conditions, as they can sustain substantial amounts of unwanted and external vibrations without degrading the performance of the gyroscope. On the other hand, external ring gyroscopes include the placement of the support pillars within the vibrating ring structure. This particular design setting is quite convenient in terms of fabrication and provides higher gyroscopic sensitivity. However, this design may lead to coupling of the vibrational modes and potentially compromise the performance of the gyroscope. This research discusses and compares the findings of a modal analysis of the two distinguished design approaches for the MEMS vibrating ring gyroscopes.

Keywords

• MEMS
• MEMS design
• vibrating ring gyroscope
• internal ring
• external ring
• ring resonator