Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

• Joost Romijn,
• Sten Vollebregt,
• Luke M. Middelburg,
• Brahim El Mansouri,
• Henk W. van Zeijl,
• Alexander May,
• Tobias Erlbacher,
• Johan Leijtens,
• Guoqi Zhang,
• Pasqualina M. Sarro

Affiliations

Joost Romijn

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Sten Vollebregt

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Luke M. Middelburg

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Brahim El Mansouri

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Henk W. van Zeijl

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Alexander May

Fraunhofer Institute for Integrated Systems and Devices Technology IISB

Tobias Erlbacher

Fraunhofer Institute for Integrated Systems and Devices Technology IISB

Johan Leijtens

Lens R&D

Guoqi Zhang

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Pasqualina M. Sarro

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology