Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

Xiaomei Zeng; Vasiliy Pelenovich; Bin Xing; Rakhim Rakhimov; Wenbin Zuo; Alexander Tolstogouzov; Chuansheng Liu; Dejun Fu; Xiangheng Xiao

doi:10.3762/bjnano.11.29

Beilstein Journal of Nanotechnology (Feb 2020)

Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

Xiaomei Zeng,
Vasiliy Pelenovich,
Bin Xing,
Rakhim Rakhimov,
Wenbin Zuo,
Alexander Tolstogouzov,
Chuansheng Liu,
Dejun Fu,
Xiangheng Xiao

Affiliations

Xiaomei Zeng: Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China
Vasiliy Pelenovich: School of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, China
Bin Xing: School of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, China
Rakhim Rakhimov: Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China
Wenbin Zuo: Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China
Alexander Tolstogouzov: Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China
Chuansheng Liu: Shenzhen Institute of Wuhan University
Dejun Fu: Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China
Xiangheng Xiao: Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China

DOI: https://doi.org/10.3762/bjnano.11.29
Journal volume & issue: Vol. 11, no. 1
pp. 383 – 390

Abstract

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In the present study Ar+ cluster ions accelerated by voltages in the range of 5–10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range of 30–70°. The influence of incidence angle, accelerating voltage, and fluence on the ripple formation is studied. Wavelength and height of the nanoripples increase with increasing accelerating voltage and fluence for both targets. The nanoripples formed on the flat substrates remind of aeolian sand ripples. The ripples formed at high ion fluences on the nanorod facets resemble well-ordered parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates.

Published in Beilstein Journal of Nanotechnology

ISSN: 2190-4286 (Online)
Publisher: Beilstein-Institut
Country of publisher: Germany
LCC subjects: Technology: Chemical technology; Science: Physics
Website: http://www.beilstein-journals.org/bjnano/home/home.htm

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