Analysis of the Imaging Characteristics of the KB and KBA X-ray Microscopes at Non-coaxial Grazing Incidence

Abstract

In the last 20 years, requirements for x-ray lithography, space technology and ICF process diagnosis, the x-ray imaging technology has been developed. However, x-ray imaging turns out to be more difficult due to intense absorption of x-rays, and the refractive index of x band is slightly less than 1. Normal imaging method may not be suitable for x-ray band. At present, grazing reflective imaging and coded aperture imaging are commonly used for this band. This paper presents a detailed analysis of the imaging characteristics of single-mirror and double-mirror. Then the focal distance, field obliquity and aperture position of the mirrors of the KBA microscopes at grazing incidence are studied. The results show that the structure arrangement of the KBA microscope is rather reasonable, and can be considered as theoretical evidence in the design and manufacture of KBA microscopes.

Keywords

• x-ray imaging
• kba microscope
• grazing incidence
• anastigmatic system
• 81.15.cd
• 42.82.cr