State-of-the-art and recent developments in micro/nanoscale pressure sensors for smart wearable devices and health monitoring systems

Abstract

Small-sized, low-cost, and high-sensitivity sensors are required for pressure-sensing applications because of their critical role in consumer electronics, automotive applications, and industrial environments. Thus, micro/nanoscale pressure sensors based on micro/nanofabrication and micro/nanoelectromechanical system technologies have emerged as a promising class of pressure sensors on account of their remarkable miniaturization and performance. These sensors have recently been developed to feature multifunctionality and applicability to novel scenarios, such as smart wearable devices and health monitoring systems. In this review, we summarize the major sensing principles used in micro/nanoscale pressure sensors and discuss recent progress in the development of four major categories of these sensors, namely, novel material-based, flexible, implantable, and self-powered pressure sensors. Keywords: M/NEMS, Pressure sensor, Flexible sensor, Piezoresistive sensor, Capacitive sensor, Piezoelectric sensor, Resonant sensor, 2D material