High-Extraction-Rate Ta<sub>2</sub>O<sub>5</sub>-Core/SiO<sub>2</sub>-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
Jian Liu,
Youting Liang,
Lang Gao,
Chao Sun,
Jianglin Guan,
Zhe Wang,
Zhaoxiang Liu,
Zhiwei Fang,
Min Wang,
Haisu Zhang,
Ya Cheng
Affiliations
Jian Liu
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
Youting Liang
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
Lang Gao
State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-Intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China
Chao Sun
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
Jianglin Guan
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
Zhe Wang
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
Zhaoxiang Liu
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
Zhiwei Fang
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
Min Wang
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
Haisu Zhang
The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
Ya Cheng
State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.
