CuO-Ga<sub>2</sub>O<sub>3</sub> Thin Films as a Gas-Sensitive Material for Acetone Detection
Katarzyna Dyndal,
Arkadiusz Zarzycki,
Wojciech Andrysiewicz,
Dominik Grochala,
Konstanty Marszalek,
Artur Rydosz
Affiliations
Katarzyna Dyndal
Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-054 Kraków, Poland
Arkadiusz Zarzycki
Institute of Nuclear Physics Polish Academy of Sciences, PL-31342 Kraków, Poland
Wojciech Andrysiewicz
CBRTP SA, Waryńskiego 3A, 00-645 Warszawa, Poland
Dominik Grochala
Department of Biocybernetics and Biomedical Engineering, AGH University of Science and Technology, Al. Mickiewicza 30, Al. Mickiewicza 30, 30-054 Kraków, Poland
Konstanty Marszalek
Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-054 Kraków, Poland
Artur Rydosz
Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-054 Kraków, Poland
The p-n heterostructures of CuO-Ga2O3 obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the air/acetone atmosphere in the range of 0.1–1.25 ppm, as well as at various relative humidity (RH) levels (10–85%). The highest responses were obtained for samples based on the CuO-Ga2O3 (4% at. Ga).
