Research on detection method of leakage rate of rough pumping valve in space environment simulator

Abstract

As an important part of the vacuum system in the space environment simulator, the rough pumping system reduces the vacuum degree of the container from atmospheric pressure to the pressure of the high vacuum system when the space environment simulator starts up. As the key equipment of the rough pumping system, the rough pumping valve plays the role of isolating the rough pumping system from the environmental simulator, and its leakage rate has a direct impact on the vacuum degree that the space environment simulator can reach. Therefore, it is very important to detect the leakage rate of the rough pumping valve. In this paper, the leakage rate detection method of the rough pumping valve is introduced, including the valve delivery stage and valve installation stage to the simulator stage, in order to provide some basis for the follow-up valve leakage rate detection work