State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications
Shujie Liu,
Philipp Kästner,
Roland Donatiello,
Anup Shrivastava,
Marek Smolarczyk,
Mustaqim Siddi Que Iskhandar,
Md Kamrul Hasan,
Giuseppe Caruso,
Jiahao Chen,
Basma Elsaka,
Shilby Baby,
Dennis Löber,
Thomas Kusserow,
Jost Adam,
Hartmut Hillmer
Affiliations
Shujie Liu
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Philipp Kästner
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Roland Donatiello
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Anup Shrivastava
Computational Materials and Photonics Department, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, Germany
Marek Smolarczyk
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Mustaqim Siddi Que Iskhandar
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Md Kamrul Hasan
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Basma Elsaka
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Shilby Baby
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Dennis Löber
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
Computational Materials and Photonics Department, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, Germany
Hartmut Hillmer
Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany
This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.
