A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
Hongsheng Xu,
Hao Jin,
Shurong Dong,
Jinkai Chen,
Xinyu Song,
Weipeng Xuan,
Lin Shi,
Shuyi Huang,
Pengjun Zhang,
Jikui Luo
Affiliations
Hongsheng Xu
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Hao Jin
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Shurong Dong
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Jinkai Chen
Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China
Xinyu Song
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Weipeng Xuan
Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China
Lin Shi
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Shuyi Huang
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Pengjun Zhang
College of Life Sciences, China Jiliang University, Hangzhou 310018, China
Jikui Luo
Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δfm21) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments.
