A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure
Wendi Gao,
Zhixia Qiao,
Xiangguang Han,
Xiaozhang Wang,
Adnan Shakoor,
Cunlang Liu,
Dejiang Lu,
Ping Yang,
Libo Zhao,
Yonglu Wang,
Jiuhong Wang,
Zhuangde Jiang,
Dong Sun
Affiliations
Wendi Gao
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China; Beijing Advanced Innovation Center for Intelligent Robots and Systems, Beijing Institute of Technology, Beijing 100081, China; State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin 150006, China
Zhixia Qiao
Eleventh Research Institute, Sixth Academy of China Aerospace Science and Technology Co., Xi'an 710100, China
Xiangguang Han
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Xiaozhang Wang
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Adnan Shakoor
Department of Control and Instrumentation Engineering, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia; Department of Biomedical Engineering, City University of Hong Kong, Hong Kong 999077, China
Cunlang Liu
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Dejiang Lu
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China; Corresponding authors.
Ping Yang
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Libo Zhao
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China; Corresponding authors.
Yonglu Wang
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Jiuhong Wang
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Zhuangde Jiang
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Dong Sun
State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Department of Biomedical Engineering, City University of Hong Kong, Hong Kong 999077, China
This paper presents the development of a novel micro force sensor based on a laterally movable gate field-effect transistor (LMGFET). A precise electrical model is proposed for the performance evaluation of small-scale LMGFET devices and exhibits improved accuracy in comparison with previous models. A novel sandwich structure consisting of a gold cross-axis decoupling gate array layer and two soft photoresistive SU-8 layers is utilized. With the proposed dual-differential sensing configuration, the output current of the LMGFET lateral operation under vertical interference is largely eliminated, and the relative output error of the proposed sensor decreases from 4.53% (traditional differential configuration) to 0.01%. A practicable fabrication process is also developed and simulated for the proposed sensor. The proposed LMGFET-based force sensor exhibits a sensitivity of 4.65 µA·nN−1, which is comparable with vertically movable gate field-effect transistor (VMGFET) devices, but has an improved nonlinearity of 0.78% and a larger measurement range of ±5.10 µN. These analyses provide a comprehensive design optimization of the electrical and structural parameters of LMGFET devices and demonstrate the proposed sensor’s excellent force-sensing potential for biomedical micromanipulation applications.
