Nature Communications (Jun 2020)

A foundation for complex oxide electronics -low temperature perovskite epitaxy

  • Henrik H. Sønsteby,
  • Erik Skaar,
  • Øystein S. Fjellvåg,
  • Jon E. Bratvold,
  • Helmer Fjellvåg,
  • Ola Nilsen

DOI
https://doi.org/10.1038/s41467-020-16654-2
Journal volume & issue
Vol. 11, no. 1
pp. 1 – 7

Abstract

Read online

Designing complex oxides with appreciable low-temperature synthesis remains a challenge. Here, the authors demonstrate an atomic layer deposition process for LaNiO3 to enable epitaxial thin films on LaAlO3 and SrTiO3 substrates deposited at 225 °C, with no annealing required to achieve good electronic properties.