Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography

Jung-Hun Seo; Jungho Park; Deyin Zhao; Hongjun Yang; Weidong Zhou; Byeong-Kwon Ju; Zhenqiang Ma

doi:10.1109/JPHOT.2012.2236545

IEEE Photonics Journal (Jan 2013)

Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography

Jung-Hun Seo,
Jungho Park,
Deyin Zhao,
Hongjun Yang,
Weidong Zhou,
Byeong-Kwon Ju,
Zhenqiang Ma

Affiliations

Jung-Hun Seo: <formula formulatype="inline"><tex Notation="TeX">$^{1}$</tex></formula>Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI, USA
Jungho Park: <formula formulatype="inline"><tex Notation="TeX">$^{2}$</tex></formula>Display and Nano System Laboratory, School of Engineering, Korea University, Seoul, Korea
Deyin Zhao: <formula formulatype="inline"><tex Notation="TeX">$^{3}$</tex></formula>Department of Electrical Engineering, NanoFAB Center, University of Texas, Arlington, TX, USA
Hongjun Yang: Department of Electrical Engineering, NanoFAB Center, University of Texas, Arlington, TX, USA
Weidong Zhou: Department of Electrical Engineering, NanoFAB Center, University of Texas, Arlington, TX, USA
Byeong-Kwon Ju: Display and Nano System Laboratory, School of Engineering, Korea University, Seoul, Korea
Zhenqiang Ma: Department of Electrical and Computer Engineering, University of Wisconsin-Madison , USA

DOI: https://doi.org/10.1109/JPHOT.2012.2236545
Journal volume & issue: Vol. 5, no. 1
pp. 2200106 – 2200106

Abstract

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We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing techniques. High-reflectivity broadband MRs on glass were realized with measured reflectivity of 95% around 1300 nm and a bandwidth of about 100 nm. Large-area nanopattern uniformity was experimentally verified with measured reflectivity from multiple locations of the large-area MRs. The work could lead to fabrication of the large-area high-performance MR at low cost with high throughput. The reflectors can be used in many types of optoelectronic and photonic devices.

Published in IEEE Photonics Journal

ISSN: 1943-0655 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4563994

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