Charge-pumping characterization of FILOX vertical MOSFETs

Abstract

This paper presents for the first time the results of charge-pumping (CP) measurements of FILOX vertical transistors. The aim of these measurements is to provide information on the density of interface traps at the Si-SiO2 interface fabricated in a non-standard process. Flat-band and threshold voltage, as well as density of interface traps are determined. Good agreement between threshold-voltage values obtained from CP and I-V measurements is observed.

Keywords

• charge-pumping
• FILOX
• interface trap
• interface traps
• MOSFET
• vertical MOSFET