Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

• Yurov V.Yu.,
• Bushuev E.V.,
• Bolshakov A.P.,
• Antonova I.A.,
• Ralchenko V.G.,
• Konov V.I.

Affiliations

Yurov V.Yu.

Bushuev E.V.

General Physics Institute RAS

Bolshakov A.P.

Antonova I.A.

Ralchenko V.G.

Konov V.I.